FABNexus, Inc
Menu

Equipment Control Software

Products

13Products

Equipment Control Software

SECS (SECS-I and HSMS)

Data Collection & Communications Products

 

 

 

Products- Equipment Control Software

FABNexus pre-packaged software fulfills many of the critical requirements of semiconductor processing, metrology and inspection tools, as well as material-handling systems. FABNexus pre-packaged software can be used to enable and expedite the development of new tools and systems, or the re-engineering of existing control systems.

Product features include:

  • Configurable control and automation software that minimizes future programming investments.
  • Manufacturing host interface capabilities (SECS/GEM and 300mm material handling)
  • Full factory-wide or capital equipment specific integration capabilities.
  • SEMI Standards compliance.
  • Software safety interlocks and alarm management.
  • Associated services and task management