Products- Equipment Control Software
FABNexus pre-packaged software fulfills many of the critical requirements of semiconductor processing, metrology and inspection tools, as well as material-handling systems. FABNexus pre-packaged software can be used to enable and expedite the development of new tools and systems, or the re-engineering of existing control systems.
Product features include:
- Configurable control and automation software that minimizes future programming investments.
- Manufacturing host interface capabilities (SECS/GEM and 300mm material handling)
- Full factory-wide or capital equipment specific integration capabilities.
- SEMI Standards compliance.
- Software safety interlocks and alarm management.
- Associated services and task management